PENGARUH KETEBALAN LAPISAN PDMS-H TERHADAP PERFORMA NANOGENERATOR ZNO NRS/ PDMS-H/ CU
Keywords:
Nanogenerator, Piezoelectric, ZnO, Nanorod, PDMS-H, CuAbstract
In the past decade, piezoelectric nanogenerators have demonstrated relatively low power performance, necessitating advancements to enhance their efficiency. The performance improvement of piezoelectric nanogenerators can be achieved by incorporating conductive polymers into the nanogenerator layers. This study aims to investigate the effect of hydride-terminated polydimethylsiloxane (PDMS-H) layer thickness on the conductivity and performance of piezoelectric nanogenerators. The piezoelectric nanogenerators were fabricated by growing ZnO nanorods (ZnO NRs) on an ITO PET substrate using the hydrothermal method at 95°C. PDMS-H was applied over the ZnO NRs using the spin coating method with varying thicknesses, determined by spin coating speeds of 2000 rpm, 3000 rpm, 4000 rpm, and 5000 rpm. Subsequently, Cu was deposited onto the PDMS-H layer using the DC magnetron sputtering method, forming a single device. XRD patterns confirmed the successful growth of ZnO NRs with a hexagonal (wurtzite) crystal structure. SEM results showed that ZnO NRs had diameters ranging from 431 nm to 1038 nm. Additionally, UV-Vis characterization of ZnO NRs indicated a bandgap of 3.63 eV. FTIR characterization revealed absorption peaks for ZnO NRs in the region from 4000 to 400 cm-1 and for PDMS-H in 838 cm-1 and 3243 cm-1. The electrical conductivity for each variation was4,98 x 102 Ω-1cm-1, 3,98 x 102 Ω-1cm-1, 1,37 x 102 Ω-1cm-1, and 0,05 x 102 Ω-1cm-1, with corresponding performance outputs of 732.9 µWatt, 270.3 µWatt, 170.7 µWatt, and 128.7 µWatt. The study results indicate that piezoelectric nanogenerators' electrical conductivity and performance are directly proportional to the PDMS-H layer thickness. As the PDMS-H layer becomes thicker, the conductivity and performance of the piezoelectric nanogenerators increase, and conversely, as the PDMS-H layer becomes thinner, the conductivity and performance decrease.
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